Kuthetsa Mavuto a Linear Stage Wobble ndi Pitch Errors mu Multi-Axis Systems

Kodi mudakhazikitsapo makina atsopano a multi-axis, omwe adayikidwa mu kamera yanu yowonera, adayambitsa kayendetsedwe kanu ka mayendedwe - ndipo adawona chithunzicho chikuchoka patali popanda chifukwa chomveka? Kapena mwina mudawonapo kusintha kwa khalidwe la laser micromachining yanu kudutsa malo ogwirira ntchito ngakhale kuti mphamvu ndi liwiro sizinasinthe. Woyambitsa nthawi zambiri amabisala poyera: zolakwika zazing'ono zotchedwa wobble and pitch.

Zolakwika izi zimamveka ngati zobisika. Sizimayambitsa ma alarm nthawi zonse. Zimadya pang'onopang'ono mpaka zinthu zitayamba kulephera kuyang'aniridwa. Monga wopanga zinthu zolondola kwambiri yemwe wakhala akugwira ntchito pafakitale kwa zaka zoposa zisanu ndi zinayi, taona nkhaniyi ikuchitika m'mapulojekiti ambiri. Cholinga chathu apa ndikukutsogolerani - osati ndi chiphunzitso cha mabuku, koma ndi njira yothandiza yothetsera mavuto.

Ndipo tidzayankha funso lomwe nthawi zambiri limafunsidwa:"Kodi ndingachepetse bwanji kugwedezeka kwa sitepe yolunjika bwino ndikuthetsa zolakwika za pitch mu dongosolo langa la sitepe yolunjika ya multi-axis?"Imwani khofi. Tikulongosola izi pang'onopang'ono.

Kodi Zolakwika za Linear Stage Wobble ndi Pitch ndi Ziti, Zoona?

Tiyeni tisunge matanthauzo osavuta. Mumakwera siteji kuti musunthe katundu kuchokera ku A kupita ku B molunjika. Mu dziko lenileni, ngoloyo simangoyenda molunjika. Imagwedezekanso pang'ono. Kugwedezeka kumeneko kumagawika m'magulu atatu ozungulira:

Mawu:ngoloyo imakwera kapena kutsika ngati kasupe (kuzungulira mozungulira Y).

Yaw:Galeta limayendetsa kumanzere kapena kumanja (kuzungulira Z).

Mpukutu:Galeta limazungulira mozungulira mzere wa ulendo (kuzungulira mozungulira X).

Anthu akamalankhula zakugwedezeka kwa siteji yolunjika, nthawi zambiri amafotokoza kuphatikiza kwa pitch ndi yaw — kayendedwe kamene kamapangitsa gawo lanu kumva ngati likugwedeza mutu ndi kuluka panjira yake. Pa ma multi-axis stacks ambiri, pitch component imapweteka kwambiri chifukwa mphamvu yokoka ndi katundu wochotsedwa nthawi zonse zimakokera pansi pa ngolo.

Ganizirani za singano yoperekera zinthu zazing'ono yomwe yaikidwa pa Z-axis. Ngati gawo la XY loyambira lili ndikugwedezeka kwa siteji yolunjikaPa ma microradians 40 okha, nsonga ya singano imatha kusuntha ma microns oposa 4 molunjika paulendo wonse. Izi ndizokwanira kupaka mkanda womatira wa ma micron 10. Ndipo umenewo ndi mzere umodzi wokha. Mukayika ziwiri kapena zitatu, zolakwika zimawonjezeka mwachangu.

Chifukwa Chake Machitidwe Ozungulira Ambiri Amasandutsa Zolakwika Zing'onozing'ono Kukhala Mavuto Aakulu

Gawo la single-axis lingakhale ndi pitch spec ya masekondi 20 arc. Zimenezo n'zodabwitsa pa datasheet. Koma mugawo lolunjika la ma axis ambiriKuyika zinthu pamodzi, zinthu zimasokonekera. Gawo la pansi limapendekeka, ndipo kupendekeka kumeneko kumakhala njira yokhazikika yochitira siteji yomwe yayikidwa pamwamba. Ngati siteji yapamwamba ili ndi cholakwika chake cha pitch, mumapeza vuto lalikulu. Timatcha izi kuti stacking error, ndipo ndichifukwa chake dongosolo la 2-axis nthawi zambiri limachita zinthu zoyipa kuposa kuchuluka kwa ma specs ake a siteji.

Mu gantry-style multi-axis stack, pitch error kuchokera pansi axis imakhala dongosolo la dongosolo la axis iliyonse yomwe yaikidwa pamwamba pake.

Nayi chitsanzo chenicheni kuchokera pamalo athu osonkhanitsira:

Mutha kuona kuti manambala samangowonjezera - amaphatikizana ndi manja onyamula katundu ndi othamanga. Ichi ndichifukwa chakekuthetsa mavuto a kufotokozeramugawo lolunjika la ma axis ambiriayenera kuyang'ana mulu wonse, osati nkhwangwa imodzi imodzi yokha.

Kuthetsa Mavuto a Zolakwika za Gawo ndi Gawo

Kasitomala akatiyimbira foni ali ndi vuto losakhazikika, timatsatira njira yotsimikizika. Imagwira ntchito kaya muli ndi magawo athu kapena a wina aliyense. Nayi njira yogwirira ntchito:

1. Yesani Choyamba, Musaganize Kuti Mudzatero

Mukufunika njira yoyambira. Laser interferometer ndi yabwino, koma electronic level kapena autocollimator imagwiranso ntchito. Ikani mapu a angular error motsatira ulendo wonse wa axis iliyonse, yoyikidwa momwe ilili mu makina anu. Lembani phokoso la peak-to-valley ndikuyang'ana. Musadumphe sitepe iyi - imakulepheretsani kuthamangitsa mizimu.

2. Yang'anani Malo Oyikira

Ichi ndi chifukwa chachikulu chakugwedezeka kwa siteji yolunjikazomwe timaziona m'munda. Ngati chitsulo chanu choyambira sichili chosalala, mumakoka siteji yosalala pamalo opindika, ndikusokoneza njira zoyendetsera ma bearing. Masulani mabotolo oyikapo pang'ono ndikuyika geji ya feeler pansi pa siteji. Shim ya 5-micron pansi pa ngodya imodzi imatha kudula cholakwika cha pitch pakati. Gwiritsani ntchito shim stock kapena kukanda pamwamba pake mosalala.

3. Yang'anani Mtolo Wanu ndi Nthawi Yomwe Mumavutika Kwambiri

Gawo lililonse lili ndi voti ya moment load (Nm). Ngati load yanu ikupita kutali, mphamvu ya leverage imapanga voti ya pitch-down yomwe ma bearing amalimbana nthawi zonse. Yesani mtunda kuchokera pakati pa carriage mpaka pakati pa kulemera kwa chida chanu. Chulukitsani zimenezo ndi kulemera. Ngati nambala iyi ipitirira spec ya siteji, mudzawonakugwedezeka kwa siteji yolunjikaOnjezani katundu pansi pa katundu. Konzani mwa kuwonjezera chinthu chotsutsana nacho kapena kusuntha katunduyo pafupi.

4. Kusintha kwa Kuyika Zinthu Pasadakhale

Magawo ozungulira ndi otsogolera okhala ndi mpira amafunika kuyika bwino kuti achotse malo obisika mkati. Pakapita nthawi, kuwonongeka kumamasula kuyika kumeneku, ndipo ngoloyo imayamba kugwedezeka pang'onopang'ono. Magawo ambiri amakhala ndi screw yosinthira kapena kamera yosiyana. Imangitseni pang'onopang'ono pamene mukuyang'anira mphamvu ya injini (ya magawo oyendetsedwa ndi injini) kapena mphamvu yokankhira (yamanja). Mukufuna kukwera pang'ono komanso kosalala kwa kukoka. Mukasintha, yesaninso cholakwika chanu cha pitch. Iyenera kutsika kwambiri.

5. Yeretsani ndi Kuyang'ana Misewu Yothamangira Mipikisano

Dothi limapha kulondola. Tinthu tating'onoting'ono tofanana ndi tsitsi la munthu tomwe timayikidwa mu mpikisano wa bearing tingayambitse kukwera kwamphamvu kwa phula pamalo enaake paulendo. Chotsani zophimba, pukutani zitsulo ndi nsalu yopanda ulusi ndi solvent, ndikudzolanso mafuta ofunikira. Ngati siteji ikugwiritsa ntchito ma crossroller, onetsetsani kuti khola silikulumikizana. Tawona kukonza kosavuta koyeretsa 30% yakugwedezeka kwa siteji yolunjikamavuto nthawi yomweyo.

6. Kukhazikika kwa Orthogon mu Stack

Ngati ma axes anu a X ndi Y sali a sikweya bwino, Y-axis idzakwera kapena kutsika pamene X ikuyenda, zomwe zimawoneka ngati cholakwika cha pitch pa axis yapamwamba. Gwiritsani ntchito sikweya yolondola ndi chizindikiro choyimbira kuti mutsimikizire ngodya yoyikira pakati pa ma axes. Masulani mabolts, dinani pang'onopang'ono kuti mugwirizane, gwiraninso mwamphamvu mu mawonekedwe a nyenyezi. Gawo limodzi ili nthawi zambiri limathetsa chinsinsi cha kusinthasinthakugwedezeka kwa siteji yolunjikam'malo osiyanasiyana oyendera.

Nayi pepala lachinyengo lothandizira kuthetsa mavuto kuti muwone mwachangu:

Zabwinokuthetsa mavuto a kufotokozerandi njira ya 80% ndi zida za 20%. Tsatirani ndondomekoyi ndipo mudzazindikira chomwe chimayambitsa vutoli.

Maseŵera ozungulira ozungulira motsutsana ndi ozungulira mpira kuti azitha kugwedezeka komanso kuchita bwino poyimba

Posachedwapa, aliyense amene akumanga makina olondola amakumana ndi funso lofunika kwambiri losankha. Ndi njira yakale kwambiriMaseŵera ozungulira ozungulira motsutsana ndi ozungulira mpira kuti azitha kugwedezeka komanso kuchita bwino poyimbaMkangano. Palibe yankho limodzi lomwe likukwanira onse. Tiyeni tigawane nkhaniyi kutengera zomwe tayesa pa mipando yathu yosonkhanitsira zinthu kwa zaka 9.

Magawo ozunguliraGwiritsani ntchito ma cylindrical rollers mu V-groove. Amafika polumikizana ndi mzere, zomwe zikutanthauza kuuma kwambiri komanso zolakwika zochepa za angular.Malangizo olunjika okhala ndi mpiraGwiritsani ntchito mipira yozungulira yomwe imalumikizana ndi mfundo. Ndi yachangu, imatha kuyenda nthawi yayitali mosavuta, koma imakhala ndi kuuma pang'ono kwa ngodya.

Gawo Lozungulira Lozungulira	Buku Lotsogolera Kunyamula Mipira

Kuti tipange konkriti iyi, nayi kufananiza kutengera magawo wamba mu mtundu wazinthu zathu (ulendo 100 mm, m'lifupi mwa thupi 60 mm):

Ngati njira yanu ikufuna kuchita zinthu molimbika kwambirikugwedezeka kwa siteji yolunjikakulamulira — mwachitsanzo mu kuwala kapena kuyang'anira — chozungulira chozungulira ndiye chotchuka kwambiri. Nthawi zambiri timatsogolera anthu a semiconductor ku chozungulira chozunguliragawo lolunjika la ma axis ambiripachifukwa chimenecho. Koma ngati mukufuna kuyenda theka la mita pa liwiro lalikulu ndi katundu wolemera makilogalamu 15 ndipo mutha kuwona ndikubweza zolakwika za angular mu mapulogalamu, gawo lolondola lonyamula mpira ndi lomveka bwino.

Chofunika kwambiri ndi kufananiza ukadaulo ndi bajeti yeniyeni ya zolakwika, osati kungotsatira zomwe zili papepala.

Zokonza Zapadziko Lonse mu Mapulogalamu Atatu Aakulu

Tiyeni tigwiritse ntchito izi. Umu ndi momwe tingachitirekugwedezeka kwa siteji yolunjikandipo zolakwika pa mawu zimaonekera — ndipo zimathetsedwa — m'magawo atatu ovuta.

Kuyang'anira Wafer wa Semiconductor

MuKuyang'ana kwa wafer wa semiconductor, agawo lolunjika la ma axis ambiriAmajambula wafer pansi pa cholinga cha maikulosikopu. Kuzama kwa kuyang'ana kungakhale kochepera 1 micron. Ngati siteji ya siteji ili ndi masekondi 30 a arc-seconds, pamwamba pa wafer imasuntha ndi ma microns angapo panthawi yojambula. Zimenezi zimakupatsani zithunzi zosawoneka bwino komanso zolakwika zomwe simunazione.

Mainjiniya athu nthawi zambiri amalimbana ndi vutoli polimbitsa orthogonality, kuchepetsa Abbe offset (kuyika cholinga pamwamba pa ngolo yoyenda), ndikusankha magawo ozungulira okhala ndi pitch yoyezedwa pansi pa masekondi 15 arc-seconds. Tikulangizanso kuti pakhale nthawi yotenthetsera kuti pakhale kukhazikika kwa kutentha musanayambe kuyang'aniridwa. Kasitomala m'modzi amadula zolakwika zawo za defocus ndi 40% pongokonza flatness ya maziko omangirira.

Kukonza Ma Micromachining ndi Laser

Mumakina opangira ma micromachine a laser, ngodya ya denga ndi yofunika. Ngati siteji yatsika panthawi yodula, kerf imakula ndipo m'mbali mwake mumachepa. Tinagwira ntchito ndi wopanga zida zamankhwala yemwe anali kuchotsa ma stenti chifukwa cha kusinthasintha kwa kapangidwe kake pamalo ogwirira ntchito.

Makina odulira a laser a mafakitale okhala ndi mizere yolunjika yowonekera — cholakwika cha pitch mu gantry axes chimatanthauzira mwachindunji ku kerfs zochepetsedwa ndi kuya kosagwirizana kwa kudula pa envelopu yogwirira ntchito.

XY yawogawo lolunjika la ma axis ambirianali ndi vuto losakonzedwa la ma arc-sekondi 45 pansi pa katundu wa cantilever. Mwa kusintha kupita ku gawo lalikulu lozungulira lokhala ndi mphindi 3 × yokwera, ndikugwiritsa ntchito pulogalamu yolipirira zolakwika za masekondi 10 otsala a arc, adabweretsa kusiyana kwa kudula mkati mwa kulekerera. Palibenso zotsalira.kugwedezeka kwa siteji yolunjikaNkhaniyi kwenikweni inali yongochitika mwadzidzidzi.

Kulinganiza Kokha kwa Optical

Mukukonza kuwala kokhazikikaNgati siteji yanu ikuyenda pang'onopang'ono kwa masekondi 50, mphamvu ya coupling imachepa ndipo njira yolumikizira imathera nthawi yofunafuna.

Gawo lolondola la mzere wolunjika loyikidwa pa bolodi lopangidwa ndi kuwala — kulumikizana kwa ulusi ndi kukonza kwa photonic kumadalira kukhazikika kwa makina a sub-arc-second kuti algorithm yosakira ikhale yachangu komanso yobwerezabwereza.

Makasitomala athu a nsanja yolumikizira nthawi zambiri amafuna kugwedezeka kwa manambala a arc-second imodzi. Amagwiritsa ntchito cross-rollergawo lolunjika la ma axis ambiriMakonzedwe okhala ndi kukonza bwino kwa piezo komanso mamapu olakwika okonzedwa ndi fakitale. Labu imodzi yomwe timathandizira idaphatikiza magawo athu ozungulira ndi ma piezo actuators ndipo idakwaniritsa kuzungulira kwa 3× mwachangu chifukwa chakuti kugwedezeka kwa makina komwe kunali pansi kunali kochepa mokwanira kuchepetsa malo ofufuzira.

Zizolowezi Zosamalira Mwachangu Zomwe Zimapangitsa Kuti Zinthu Ziziyenda Bwino

Mukangoyimitsa makina anu, zizolowezi zosavuta zingapo zimaletsa kugwedezeka kubwerera m'mbuyo:

Pukutani zitsulo mwezi uliwonse.Gwiritsani ntchito isopropyl alcohol ndi chopukutira chopanda lint.

Pakani mafutanso panthawi yake.Yang'anani buku lathu la malangizo kuti mupeze mafuta oyenera. Kuchuluka kwambiri n'koipa monga momwe kulili kochepa.

Yang'anani kudzaza zinthu pasadakhale miyezi isanu ndi umodzi iliyonse.Timachita izi pa ma demo units athu.

Kukhazikitsanso mabotolo owonjezera mphamvu chaka chilichonse.Kugwedezeka kumawamasula, ndipo cholakwika cha mawu chimakula.

Njira izi zimatenga mphindi zochepa koma zimasunga maola ambirikuthetsa mavuto a kufotokozerapambuyo pake.

Nthawi Yomwe Muyenera Kulankhulana Nafe

Nthawi zinakugwedezeka kwa siteji yolunjikaVutoli likukulirakulira. Mwina katundu wolipirira ndi wovuta kwambiri kuti usathe kulinganizidwa mosavuta. Mwina mukufuna siteji yapadera yokhala ndi kufalikira kosagwirizana ndi muyezo. Kapena mwina simukudziwa ngati cholakwikacho chikuchokera pa siteji kapena kapangidwe kake.

Apa ndi pomwe gulu lathu lingathandize. Takhala zaka zoposa zisanu ndi zinayi tikugwira ntchito yokonza mainjiniya ndi ma siteshoni olondola a injini komanso nsanja zolumikizirana bwino. Sitikugulitsani nambala ya gawo lokha. Timakambirana za momwe katundu wanu amayendera, njira yanu yoyendera, cholinga chanu cholondola - ndipo tikupangirani njira yolumikizirana.gawo lolunjika la ma axis ambirikhwekhwe lomwe limagwira ntchito kuyambira tsiku loyamba. Mndandanda wazinthu zathu umaphatikizapo chilichonse kuyambira masilaidi osavuta ozungulira pamanja mpaka ma XYZθ stacks odziyimira okha okhala ndi kuphatikiza kwa owongolera.

Ngati mukulimbana ndikugwedezeka kwa siteji yolunjikandi kuthera nthawi yochuluka pakuthetsa mavuto a kufotokozera, titumizireni uthenga kapena imbani mainjiniya athu a mapulogalamu. Mwina tathetsa vuto lofananalo kale, ndipo tikusangalala kugawana zomwe tikudziwa.

Kufotokozera mwachidule

Zolakwika za kugwedezeka ndi kumveka bwino mugawo lolunjika la ma axis ambiriMachitidwe ndi ofala, koma si a vuduu. Amachokera ku zinthu zoyezeka komanso zokhazikika: kukhazikika, kuyika zinthu zoyambira, katundu wa cantilever, momwe zimagwirira ntchito, ndi mawonekedwe a stack. Gwiritsani ntchito muyeso wozikidwa pa muyesokuthetsa mavuto a kufotokozeranjira yoyenera, sankhani ukadaulo woyenera wa njira yoyendetsera (kumbukiraniMaseŵera ozungulira ozungulira motsutsana ndi ozungulira mpira kuti azitha kugwedezeka komanso kuchita bwino poyimbakusinthana), ndipo pitirizani mayendedwe anu ndi machitidwe osavuta. Njira yanu — kayaKuyang'ana kwa wafer wa semiconductor,makina opangira ma micromachine a laserkapenakukonza kuwala kokhazikika— idzakuthokozani ndi phindu lalikulu komanso nthawi yochepa yopuma.

Tikukhulupirira kuti bukuli likukupatsani njira yomveka bwino yopitira patsogolo. Ndipo kumbukirani, ngati mungadzifunse kuti,"Kodi ndingachepetse bwanji kugwedezeka kwa sitepe yolunjika bwino ndikuthetsa zolakwika za pitch mu dongosolo langa la sitepe yolunjika ya multi-axis?"— muli ndi mnzanu amene wakhala akuyankha funso limenelo kwa zaka pafupifupi khumi. Tiyeni tiyambe kuchita zomwe mukufuna.