Kev daws teeb meem ntawm Linear Stage Wobble thiab Pitch Errors hauv Multi-Axis Systems

Koj puas tau teeb tsa lub tshuab multi-axis tshiab, hu rau hauv koj lub koob yees duab pom kev, pib koj cov kev txav mus los - thiab saib cov duab poob ntawm qhov pom tsis meej yam tsis muaj laj thawj? Los yog tej zaum koj tau pom koj cov laser micromachining txiav qhov zoo hloov pauv thoob plaws thaj chaw ua haujlwm txawm tias lub zog thiab qhov ceev teeb tsa tseem zoo ib yam. Tus neeg ua txhaum feem ntau nkaum hauv qhov pom tseeb: qhov yuam kev me me hu ua wobble thiab pitch.

Cov yuam kev no zoo li zais cia xwb. Lawv tsis tas li ua rau muaj kev ceeb toom. Lawv maj mam noj koj cov txheej txheem kom txog thaum cov khoom pib tsis ua haujlwm zoo. Ua ib lub chaw tsim khoom uas muaj ntau tshaj cuaj xyoo hauv lub Hoobkas, peb tau pom zaj dab neeg no ua si thoob plaws ntau pua qhov project. Peb lub hom phiaj ntawm no yog coj koj mus dhau nws - tsis yog nrog kev xav hauv phau ntawv, tab sis nrog kev daws teeb meem uas siv tau tiag tiag.

Thiab peb yuav teb cov lus nug uas peb feem ntau raug nug:"Kuv yuav ua li cas thiaj li txo tau qhov kev co ntawm theem linear thiab daws teeb meem qhov yuam kev ntawm kuv lub tshuab linear ntau axis?"Haus kas fes. Peb mam li qhib qhov no ib kauj ruam zuj zus.

Dab tsi yog Linear Stage Wobble thiab Pitch Errors, Tiag tiag?

Cia peb ua kom cov lus txhais yooj yim. Koj teeb tsa ib theem kom txav ib qho khoom thauj los ntawm A mus rau B hauv ib txoj kab ncaj. Hauv lub ntiaj teb tiag tiag, lub tsheb thauj khoom tsis yog tsuas yog txav mus ncaj xwb. Nws kuj tseem co me ntsis. Qhov kev co ntawd faib ua peb lub kaum sab xis:

Suab:lub tsheb nees tig mus rau saum lossis nqis zoo li lub seesaw (tig ib ncig ntawm Y).

Yaw:lub tsheb laij teb tig mus rau sab laug lossis sab xis (tig ib ncig ntawm Z).

Yob:lub tsheb thauj khoom tig ib ncig ntawm lub axis ntawm kev mus ncig (kev tig ib ncig ntawm X).

Thaum tib neeg tham txoglinear theem wobble, lawv feem ntau piav qhia txog kev sib xyaw ua ke ntawm pitch thiab yaw - qhov kev txav uas ua rau koj qhov chaw zoo li nws tab tom nodding thiab weaving raws nws txoj kev. Rau feem ntau ntawm ntau-axis stacks, lub pitch Cheebtsam mob tshaj plaws vim tias lub ntiajteb txawj nqus thiab cantilevered loads tas li rub mus rau hauv qab ntawm lub carriage.

Xav txog ib rab koob me me uas tau teeb tsa rau ntawm Z-axis. Yog tias theem XY hauv qab muaj iblinear theem wobbleTsuas yog 40 microradians xwb, lub hau koob tuaj yeem txav mus hla 4 microns ntsug hla qhov kev mus ncig. Qhov ntawd txaus los pleev ib lub hlaws nplaum 10-micron dav. Thiab qhov ntawd tsuas yog ib txoj kab xwb. Thaum koj sib sau ua ob lossis peb, qhov yuam kev ntxiv sai.

Vim Li Cas Multi-Axis Systems Thiaj Li Hloov Cov Yuam Kev Me Me Mus Ua Teeb Meem Loj

Ib theem ib-axis yuav muaj lub suab spec ntawm 20 arc-seconds. Qhov ntawd zoo kawg nkaus ntawm daim ntawv teev cov ntaub ntawv. Tab sis nyob rau hauv ib qhontau axis linear theempawg, tej yam tau ntxhov siab. Lub theem hauv qab tig, thiab qhov kev tig ntawd dhau los ua qhov kev sib txawv rau theem uas tau teeb tsa rau saum toj. Yog tias theem sab saud muaj nws qhov yuam kev suab, koj tau txais ob lub whammy. Peb hu qhov yuam kev stacking no, thiab nws yog vim li cas lub kaw lus 2-axis feem ntau ua haujlwm phem dua li qhov sib sau ua ke ntawm nws cov qauv theem ib leeg.

Hauv cov qauv gantry ntau-axis stack, qhov yuam kev ntawm lub suab los ntawm lub axis hauv qab dhau los ua qhov kev sib txuas ua ke rau txhua lub axis mounted saum nws.

Nov yog ib qho piv txwv tiag tiag los ntawm peb lub rooj sib txoos:

Koj tuaj yeem pom cov lej tsis tsuas yog ntxiv xwb - lawv sib xyaw nrog cov caj npab thauj khoom thiab lub zog. Qhov no yog qhov tseeb vim li caskev daws teeb meem ntawm qhov yuam kev pitchnyob rau hauv ib qhontau axis linear theemyuav tsum saib tag nrho cov pawg, tsis yog tsuas yog ib qho axes xwb.

Cov Kauj Ruam Ib Kauj Ruam Los Ntawm Kev daws teeb meem yuam kev ntawm Pitch

Thaum ib tug neeg siv khoom hu rau peb nrog teeb meem kev co, peb ua raws li cov txheej txheem uas tau ua pov thawj lawm. Nws ua haujlwm txawm tias koj muaj peb cov theem lossis lwm tus neeg li. Nov yog txoj hauv kev ua haujlwm:

1. Ntsuas Ua Ntej, Kwv Yees Tsis Txhob Kwv Yees

Koj xav tau ib lub baseline. Lub laser interferometer zoo tagnrho, tab sis lub electronic level lossis autocollimator kuj ua haujlwm tau thiab. Kos daim duab qhia qhov angular error raws li qhov kev mus ncig ntawm txhua lub axis, uas tau teeb tsa raws nraim li nws nyob hauv koj lub tshuab. Sau qhov siab tshaj plaws mus rau hav thiab yaw. Tsis txhob hla qhov kauj ruam no - nws tiv thaiv koj ntawm kev caum dab.

2. Tshawb xyuas qhov chaw teeb tsa

Qhov no yog tus lej ib ua rau muajlinear theem wobbleuas peb pom hauv daim teb. Yog tias koj lub phaj hauv paus tsis tiaj tus, koj ntsia ib theem tiaj tus rau ntawm qhov chaw nkhaus, ua rau cov kab sib tw tsis sib xws. Tshem cov ntsia hlau me ntsis thiab txav lub ntsuas feeler hauv qab theem. Lub shim 5-micron hauv qab ib lub ces kaum tuaj yeem txiav qhov yuam kev suab hauv ib nrab. Siv cov shim Tshuag lossis khawb qhov chaw tiaj tus.

3. Saib Koj Lub Thauj Khoom Thiab Lub Sijhawm Uas Koj Dhia Dhau

Txhua theem muaj qhov ntsuas lub zog thauj khoom (Nm). Yog tias koj lub nra hnyav nthuav dav mus deb, qhov cuam tshuam ntawm lub zog rub yuav tsim lub zog nqes uas cov bearings sib ntaus sib tua tas li. Ntsuas qhov deb ntawm qhov chaw nruab nrab ntawm lub tsheb thauj khoom mus rau qhov chaw nruab nrab ntawm koj lub cuab yeej. Muab qhov ntawd sib npaug los ntawm qhov hnyav. Yog tias tus lej no tshaj qhov ntsuas ntawm theem, koj yuav pomlinear theem wobblence ntxiv thaum lub nra hnyav. Kho nws los ntawm kev ntxiv qhov sib npaug lossis txav lub nra hnyav kom ze dua.

4. Kev Kho Ua Ntej

Cov theem uas muaj cov menyuam hla thiab cov lus qhia uas muaj pob yuav tsum tau muaj qhov preload kom raug kom tshem tawm qhov chaw sab hauv. Raws li lub sijhawm dhau mus, kev hnav yuav ua rau qhov preload no so, thiab lub carriage pib co me me. Ntau theem muaj lub hau ntswj kho lossis lub cam eccentric. Nias nws me me thaum saib xyuas qhov tam sim no ntawm lub cev muaj zog (rau cov theem uas muaj cav) lossis lub zog thawb (rau phau ntawv). Koj tab tom nrhiav kev nce me ntsis, du hauv kev rub. Tom qab kho, rov ntsuas koj qhov yuam kev ntawm lub suab. Nws yuav tsum poob qis pom tseeb.

5. Ntxuav thiab Tshawb Xyuas Cov Kev Sib Tw

Av ua rau tsis ua haujlwm zoo. Ib qho me me uas loj li cov plaub hau tib neeg nyob hauv qhov sib tw ntawm lub cev muaj zog tuaj yeem ua rau lub suab nce siab ntawm qhov chaw tshwj xeeb hauv kev mus ncig. Tshem cov npog, so cov hlau nrog daim ntaub tsis muaj plaub thiab cov tshuaj yaj, thiab rov ua kom lubricate nrog cov roj pom zoo. Yog tias theem siv cov menyuam hla, xyuas kom lub tawb tsis khi. Peb tau pom kev kho yooj yim 30% ntawmlinear theem wobbleteeb meem tam sim ntawd.

6. Orthogonality hauv Stack

Yog tias koj cov X thiab Y axes tsis yog square zoo meej, Y-axis yuav nce lossis dhia thaum X txav mus, uas zoo li qhov yuam kev ntawm lub axis sab saud. Siv lub precision square thiab dial indicator los xyuas lub kaum sab xis ntawm mounting axes. Loosen bolts, kov maj mam rau hauv qhov sib phim, rov nruj dua hauv tus qauv hnub qub. Cov kauj ruam no feem ntau daws qhov tsis paub meej ntawm kev hloov pauvlinear theem wobblehla ntau qhov kev mus ncig sib txawv.

Nov yog daim ntawv qhia txog kev daws teeb meem rau kev siv sai:

Zookev daws teeb meem ntawm qhov yuam kev pitchyog 80% txoj kev thiab 20% cov cuab yeej. Ua raws li qhov kev txiav txim thiab koj yuav pom qhov ua rau muaj teeb meem.

Cov theem kab sib tshuam uas muaj pob thiab cov kab sib txuas rau kev co thiab suab nrov

Sai dua los yog tom qab, leej twg tsim lub kaw lus precision ntsib cov lus nug tseem ceeb rau kev xaiv. Nws yog qhov classicCov theem kab sib tshuam uas muaj pob thiab cov kab sib txuas rau kev co thiab suab nrovkev sib cav. Tsis muaj ib lo lus teb twg uas haum rau txhua tus. Cia peb muab nws cais ua raws li qhov peb tau ntsuas ntawm peb lub rooj sib txoos dhau 9 xyoo.

Cov theem hla-rollersiv cov cylindrical rollers hauv V-groove. Lawv ua tiav kev sib cuag kab, uas txhais tau tias muaj kev ruaj khov dua thiab qhov yuam kev qis dua.Cov lus qhia linear uas muaj pobsiv cov pob rov qab los nrog qhov sib cuag. Lawv nrawm dua, tswj tau kev mus ncig ntev dua yooj yim, tab sis muaj qhov tsis sib zog ntawm lub kaum sab xis me ntsis.

Theem Roller hla	Phau Ntawv Qhia Txog Kev Tuav Pob

Yuav ua kom cov pob zeb no zoo li no, ntawm no yog kev sib piv raws li cov theem ib txwm muaj hauv peb cov khoom lag luam (kev mus ncig 100 mm, lub cev dav 60 mm):

Yog tias koj cov txheej txheem xav tau qhov nruj tshaj plawslinear theem wobblekev tswj hwm - piv txwv li hauv kev teeb tsa kho qhov muag lossis kev tshuaj xyuas - hla-roller yog qhov nyiam tshaj plaws. Peb feem ntau coj cov neeg semiconductor mus rau hla-rollerntau axis linear theemcov khoom sib dhos rau qhov laj thawj ntawd. Tab sis yog tias koj xav tau npog ib nrab 'meter' ntawm kev mus ncig ntawm qhov ceev ceev nrog 15 kg payload thiab tuaj yeem kos duab thiab them cov teeb meem angular hauv software, qhov kev ntsuas pob-bearing theem ua rau muaj kev nkag siab zoo meej.

Qhov tseem ceeb yog kev sib phim cov thev naus laus zis rau qhov yuam kev tiag tiag, tsis yog tsuas yog caum qhov qis tshaj plaws ntawm daim ntawv xwb.

Kev Kho Dua Tshiab Hauv Peb Lub Ntsiab Lus Tseem Ceeb

Cia peb siv qhov no. Nov yog li caslinear theem wobblethiab cov yuam kev ntawm kev hais lus tshwm sim - thiab daws tau - hauv peb qhov chaw uas nyuaj heev.

Kev Tshuaj Xyuas Wafer Semiconductor

Nyob rau hauvKev tshuaj xyuas semiconductor wafer, ibntau axis linear theemcov duab rasters ntawm lub wafer nyob rau hauv lub hom phiaj microscope. Qhov tob ntawm kev tsom mus rau qhov tob tuaj yeem tsawg dua 1 micron. Yog tias lub stage stage muaj 30 arc-seconds ntawm pitch, qhov chaw wafer hloov pauv los ntawm ntau lub microns thaum lub sijhawm scan. Qhov ntawd ua rau koj cov duab tsis meej thiab tsis pom qhov tsis zoo.

Feem ntau peb cov engineers tawm tsam qhov teeb meem no los ntawm kev ua kom nruj orthogonality, txo qhov Abbe offset (tso lub hom phiaj rau saum lub carriage txav mus los), thiab xaiv cov theem hla-roller nrog lub suab ntsuas qis dua 15 arc-seconds. Peb kuj pom zoo kom muaj lub voj voog sov so kom ruaj khov ua ntej kev tshuaj xyuas khiav. Ib tus neeg siv khoom txiav lawv cov kev ua yuam kev defocus los ntawm 40% tsuas yog kho qhov tiaj tiaj ntawm lub hauv paus mounting.

Kev Siv Laser Micromachining

Nyob rau hauvkev siv tshuab laser micromachining, lub kaum sab xis ntawm lub teeb tseem ceeb. Yog tias lub theem nce thaum lub sijhawm txiav, lub kerf dav dua thiab cov npoo yuav tapered. Peb tau ua haujlwm nrog tus tsim khoom siv kho mob uas tau rhuav tshem cov stents vim tias qhov zoo ntawm kev txiav tsis sib xws thoob plaws thaj chaw ua haujlwm.

Lub tshuab txiav laser rau kev lag luam nrog cov kab qhia kev qhia - qhov yuam kev hauv cov gantry axes ncaj qha txhais mus rau tapered kerfs thiab qhov tob txiav tsis sib xws thoob plaws hauv daim ntawv ua haujlwm.

Lawv XYntau axis linear theemmuaj qhov yuam kev tsis raug kho ntawm 45 arc-seconds nyob rau hauv cantilever load. Los ntawm kev hloov mus rau theem dav dua hla-roller nrog lub sijhawm ntsuas 3 × siab dua, thiab siv software error compensation rau 10 arc-seconds seem, lawv coj qhov kev hloov pauv txiav hauv kev kam rau siab. Tsis muaj seem ntxiv lawm. Lublinear theem wobbleqhov teeb meem yog lub suab nrov uas tshwm sim los ntawm lub sijhawm.

Kev Teeb Pom Kev Tsis Siv Neeg

Nyob rau hauvkev teeb tsa optical tsis siv neegntawm cov chips photonic, koj tab tom sim txuas lub teeb nrog qhov tseeb ntawm sub-micron. Yog tias koj theem wobbles 50 arc-seconds, qhov kev sib txuas ua haujlwm poob qis thiab cov alignment algorithm siv sijhawm nrhiav.

Cov theem linear manual precision mounted rau ntawm lub optical breadboard - fiber coupling thiab photonic alignment setups nyob ntawm sub-arc-second mechanical stability kom cov algorithm tshawb nrhiav sai thiab rov ua dua.

Peb cov neeg siv khoom siv lub platform alignment feem ntau xav tau ib tus lej arc-second wobble. Lawv siv crossed-rollerntau axis linear theemCov khoom sib dhos nrog kev sib xyaw ua ke ntawm piezo fine-tuning thiab cov ntawv qhia yuam kev uas tau teeb tsa los ntawm lub Hoobkas. Ib lub chaw kuaj mob uas peb txhawb nqa tau sib xyaw peb cov theem hla-roller nrog cov piezo actuators thiab ua tiav 3 × lub voj voog sib dhos sai dua vim tias qhov kev co ntawm lub cev hauv qab qis txaus kom ua rau thaj chaw tshawb nrhiav me dua.

Cov Kev Cai Saib Xyuas Sai Sai Uas Ua Rau Kom Tsis Txhob Wobbling

Thaum koj lub system raug hu rau hauv, ob peb yam yooj yim yuav tiv thaiv qhov kev co tsis txhob rov qab los:

So cov hlau txhua hli.Siv cawv isopropyl thiab daim ntaub so tsis muaj plaub.

Rov ua kom roj nplua nyeem raws sijhawm.Saib peb phau ntawv qhia seb puas muaj roj zoo. Ntau dhau kuj phem ib yam li tsawg dhau.

Tshawb xyuas qhov preload txhua rau lub hlis.Peb ua qhov no rau peb cov chav ua qauv qhia.

Rov ua kom lub zog ntawm cov bolts mounting txhua xyoo.Kev co ua rau lawv xoob, thiab qhov yuam kev ntawm lub suab loj hlob tuaj.

Cov kauj ruam no siv sijhawm ob peb feeb tab sis txuag tau ntau teevkev daws teeb meem ntawm qhov yuam kev pitchtom qab.

Thaum Koj Yuav Tsum Tiv Tauj Peb

Qee zaum iblinear theem wobbleqhov teeb meem khiav tob dua. Tej zaum qhov payload nyuaj dhau los sib npaug yooj yim. Tej zaum koj xav tau ib theem kev cai nrog qhov sib kis tsis yog tus qauv. Los yog tej zaum koj tsuas yog tsis paub tseeb tias qhov yuam kev yog los ntawm theem lossis cov qauv.

Qhov ntawd yog qhov uas peb pab neeg tuaj yeem pab tau. Peb tau siv sijhawm ntau tshaj cuaj xyoo los tsim phau ntawv qhia txog kev tsim khoom thiab cov theem ua haujlwm raug thiab cov platform sib dhos tag nrho. Peb tsis tsuas yog muag tus lej ib feem rau koj xwb. Peb tham txog koj cov xwm txheej thauj khoom, koj qhov kev mus ncig, koj lub hom phiaj raug - thiab pom zoo kom muajntau axis linear theemkev teeb tsa uas ua haujlwm txij hnub thawj zaug. Peb cov khoom lag luam npog txhua yam los ntawm kev yooj yim tes hla cov menyuam swb mus rau XYZθ stacks ua haujlwm tag nrho nrog kev koom ua ke ntawm tus maub los.

Yog koj sib cav nroglinear theem wobblethiab siv sijhawm ntau dhau raukev daws teeb meem ntawm qhov yuam kev pitch, xa xov rau peb lossis hu rau peb cov kws ua haujlwm thov. Peb tej zaum tau daws qhov teeb meem zoo sib xws ua ntej lawm, thiab peb zoo siab qhia qhov peb paub.

Kev Sau Nthuav Qhia

Wobble thiab pitch yuam kev hauvntau axis linear theemcov kab ke yog ib txwm muaj, tab sis lawv tsis yog voodoo. Lawv los ntawm cov khoom ntsuas tau, kho tau: mounting flatness, preload, cantilever loads, bearing condition, thiab stack geometry. Ua haujlwm los ntawm kev ntsuas-raws likev daws teeb meem ntawm qhov yuam kev pitchua ntu zus, xaiv cov thev naus laus zis guideway zoo (nco ntsoovCov theem kab sib tshuam uas muaj pob thiab cov kab sib txuas rau kev co thiab suab nrovkev pauv pauv), thiab tswj koj cov theem nrog cov kev cai yooj yim. Koj cov txheej txheem - seb puas yogKev tshuaj xyuas semiconductor wafer,kev siv tshuab laser micromachining, los yogkev teeb tsa optical tsis siv neeg— yuav ua tsaug rau koj nrog cov txiaj ntsig ntau dua thiab lub sijhawm tsis ua haujlwm tsawg dua.

Peb vam tias phau ntawv qhia no yuav qhia koj txog txoj kev mus tom ntej. Thiab nco ntsoov, yog tias koj nug koj tus kheej,"Kuv yuav ua li cas thiaj li txo tau qhov kev co ntawm theem linear thiab daws teeb meem qhov yuam kev ntawm kuv lub tshuab linear ntau axis?"— koj muaj ib tug khub uas tau teb cov lus nug ntawd yuav luag kaum xyoo lawm. Cia peb ua kom koj txoj kev tawm tswv yim ua haujlwm raws li nws yuav tsum tau ua.